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High Power UV Q-switched and Mode-locked Laser Comparisons for Industrial Processing Applications

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High Power UV Q-switched and Mode-locked Laser Comparisons for Industrial Processing Applications

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  • Author: Michael Kauf, Raj Patel, Jim Bovatsek, Wolfgang Gries
High power diode Pumped solid state (DPSS) UV laser have become established processing tools in OEM and industrial applications, enabling ever smaller feature sizes, higher throughput and lower costs per part. Currently, Q-switched lasers with pulse length in the nanosecond range are already in use for some of the most demanding applications in microelectronics manufacturing.

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