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Processing Benefits of High Repetition Rate and High Average Power 355 nm Laser for Micromachining of Microelectronics Packaging Materials

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Processing Benefits of High Repetition Rate and High Average Power 355 nm Laser for Micromachining of Microelectronics Packaging Materials

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  • Author: Rajesh S. Patel, James Bovatsek
For more than a decade, Newport and its Spectra-physics lasers division have supplied laser and photonic solutions to the semiconductor industry. When the first mode locked quasi-cw ultraviolet lasers were introduced in early 2000, they opened up a whole new regime of material processing that used a very low energy picoseconds pulse at a very high repetationr rate.

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