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Laser processing of ceramics for microelectronics manufacturing

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Laser processing of ceramics for microelectronics manufacturing

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  • Author: Robert S. Sposili, James Bovatsek, Rajesh Patel
Ceramic materials are used extensively in the microelectronics, semiconductor, and LED lighting industries because of their electrically insulating and thermally conductive properties, as well as for their high-temperature-service capabilities. However, their brittleness presents significant challenges for conventional machining processes. In this paper we report on a series of experiments that demonstrate and characterize the efficacy of pulsed nanosecond UV and green lasers in machining ceramics commonly used in microelectronics manufacturing, such as aluminum oxide (alumina) and aluminum nitride.

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