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What Are the Special Requirements in Measurement of 193 nm Radiation?

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What Are the Special Requirements in Measurement of 193 nm Radiation?

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193 nm excimer laser radiation needs special precautions in measurement because of its strong interaction with ordinary matter. This radiation is absorbed by ordinary air and water vapor in the air so that the intensity measured can vary by 1% per cm. Therefore, for accurate measurements, make sure the distance from the laser to the measurement device is the same as the distance to the point at which you wish to know the power/energy.

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