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Motion Applications Engineering –ISTD

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Motion Applications Engineering –ISTD

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The Newport XPS motion controller offers different compensation methods that help improving the performance of a motion system. This application note shows possible improvements to the accuracy of a single axis linear translation stage when utilizing the XPS linear error compensation and positioner mapping functions. We will demonstrate an improvement of the accuracy of almost a factor of 10 between no compensation and the same stage with linear error compensation and positioner mapping. The resulting accuracy with mapping in this example is 0.35 µm.

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