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How to Estimate Angular Motion of a Tilt or Rotation Stage with Respect to the Linear Translation of the Actuator

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How to Estimate Angular Motion of a Tilt or Rotation Stage with Respect to the Linear Translation of the Actuator

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For rotation stages that provide a Vernier scale directly on the stage body -such as the 481-A, RS65 and RS40 -the angle of motion can be read on the scale. In the case of the 605-2 and 605-4 full range gimbal mounts, a scale is provided on the body for the azimuthal angle (but not for the elevation angle). But for all other kinematic, gimbal and tilt mounts that Newport offers, no scale is provided on the mount, so a different method to determine angular motion is needed. Newport’s manual mounts and stages are not calibrated together with their actuators. This is due to the fact that the actuators are often easily removable or interchangeable. Consequently, removing, interchanging, or adjusting the position of the actuator in the mounting block on the stage would render any calibration void.

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