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Femtosecond Laser Irradiation and Chemical Etching (FLICE); Waveguide Writing

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Femtosecond Laser Irradiation and Chemical Etching (FLICE); Waveguide Writing

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Microfabrication technologies have miniaturised many fields, from microelectronics to photonics, paving the way for a wide range of new applications. In particular, the capability of realising microfluidic channels has revolutionised the field of optofluidics. Microfluidic channels and patterns are typically fabricated by lithographic and chemical-etching techniques, but these approaches are primarily limited to the fabrication of two-dimensional patterns on the surface. Indeed, in order to create a true 3-D structure several layers of glass substrates need to be patterned, etched and fused together.

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