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Building a High Performance Non-contact Optical Surface Metrology System

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Building a High Performance Non-contact Optical Surface Metrology System

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Both the XM and FMS Linear stages, which were designed for high straightness and flatness, are excellent solutions to build high-precision 3D Surface Measurement tools using Conoprobe and NanoConoprobe sensors. With the extensive offering of Newport Motion products and capability of Optimet sensors, there are many potential solutions for non-contact surface measurement on both specular and diffuse surfaces. The combination of Newport Motion with Optimet Sensors also offers expansion of standard capability. For example, integrated rotation stages can overcome angular working range limitations of the NanoConoprobe to profile non-flat surface geometries. Sequential rotational scanning with selective logic applied to Signal to Noise measurements of the sensor allow a complete, accurate and high resolution measurement of curved surface profiles. Samples with depths exceeding the working range capability of the selected objective can also be overcome by using an integrated z-axis stage.

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