1.  Home
  2. Whitepapers
  3. Newport XY-Theta Motion System For Laser Scribing on LED Wafer

Newport XY-Theta Motion System For Laser Scribing on LED Wafer

Download Whitepaper

Newport XY-Theta Motion System For Laser Scribing on LED Wafer

Download Whitepaper
Laser Scribing is a microfabrication technique that uses a laser as a write source. The Laser Scribing method improves yield by creating finer and higher quality scribe lines on LED wafer when compared to traditional mechanical scribing. Laser scribing is a non-contact process that also reduces micro-cracking and damage to the LED wafer substrate materials such as Silicon, Sapphire, Copper or Ceramic. Newport XY-Theta motion systems have been implemented in Laser Scribing for LED manufacturing applications at several customer sites. These motion systems help achieve high precision scribing with improved long term reliability while allowing LED devices to be much more closely spaced on the wafer.

Download Whitepaper Now