Metrology and Acceptance Test Procedure

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Metrology and Acceptance Test Procedure

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For 50 years, the Newport Resource has been the reference standard used by researchers, scientists and engineers to advance their technologies, discoveries and products. In today's world of shrinking feature sizes, nanometer-scale devices as well as higher accuracy and resolution requirements, it is critical to use the highest quality components available. This is why Newport provides testing and test data for on-axis accuracy, repeatability and trajectory errors (e.g. Pitch and Yaw for linear stages and Wobble and Eccentricity for rotation stages) on every XM, GTS, IMS, ILS, MTM, UTS, MFA, VP, RGV, RG, URS, PR/SR, LTA and TRA products. A sample test data sheet is shown below.

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