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Optics Based Research - The Need for Vibration Isolated Rigid Support Structures

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Optics Based Research - The Need for Vibration Isolated Rigid Support Structures

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Advanced equipment and processes have made it possible to investigate phenomena with dimensions measured in nanometers. For example, phase-shifting optical interferometers can now measure surface roughness with a resolution of about 1 nm. In the semiconductor field, integrated circuits with submicron line widths are now being produced. Applications like these have created the demand for equally innovative vibration isolated support structures which provide the stability needed for such measurements and processes. Successfully meeting this level of stability requires careful attention to the problems of maintaining extremely precise relative alignment of the various elements of the system.

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