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Interfacing an Interferometer Encoder to an XPS Controller

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Interfacing an Interferometer Encoder to an XPS Controller

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The Newport XPS controller provides capabilities to interface with Interferometer Encoders. This position feedback is ideal for applications involving non-contact alignment, analysis, optical metrology, micro/nano lithography and many other applications. This tech note describes how to configure and setup a Renishaw Interferometer Encoder with an XPS controller. This can help with both diagnostics and measurement for an enhanced level of performance in both repeatability and accuracy.

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