Gracing Incidence Interferometer

Interferometer by Plano Optics Private Limited

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The Gracing Incidence Interferometer from Plano Optics Private Limited is an Interferometer that has a resolution of 0.03 μm. It has an accuracy of 0.1 μm - 0.4 μm + 2% of the measured value and a repeatability of 0.03 μm. This interferometer has a sensitivity of 0.5 μm, 1 μm, 2 μm, and 4 μm per fringe and flatness of 0.06 μm. It has a dynamic range of over 100 μm and measurement time of 5 seconds. This interferometer uses the grazing incidence principle and has ground, lapped, or polished surfaces. It can be monitored using a computer and is available in a housing that measures 65 cm x 65 cm x 35 cm. This interferometer is ideal for applications such as flatness measurement of reflective or non-reflective surfaces.

Product Specifications

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Product Details

  • Part Number
    Gracing Incidence Interferometer
  • Manufacturer
    Plano Optics Private Limited
  • Description
    Interferometer for Flatness Measurement Applications

General Parameters

  • Measurement Type
    Flatness, Reflectivity
  • Wavelength
    0.1 to 0.4 µm
  • Dimensions
    65 x 65 x 35 cm
  • Weight
    <40 kg
  • Relative Accuracy
    0.02
  • Note
    Repeatability: Better than 0.03 µm, Resolution: 0.03 µm, Calibrated Sensitivities: 0.5 µm, 1 µm, 2 µm & 4 µm per fringe, Flatness of Reference surface of Prism: 0.06 µm, Dynamic Range: >100 µm, Part Range: 50 to 100 mm, Measurement Time: 5 s

Technical Documents

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