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SXUV100TF135B

Photodiode by Opto Diode Corporation
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The SXUV100TF135B from Opto Diode Corporation is a 100 sq mm photodiode with integrated thin film filter. It has a detection range of 12 to 18 nm and responsivity of 0.09 A/A at 13.5 nm. The photodiode has high shunt resistance of 10 Mohm. It is availa

Product Specifications

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Product Details

  • Part Number
    SXUV100TF135B
  • Manufacturer
    Opto Diode Corporation
  • Description
    13.5 nm, Directly-Deposited Integrated Thin Film Filter Photodiode

Applications

  • Application
    Laser Power Monitoring, Semiconductor Photolithography, Metrology Systems

General Parameters

  • Breakdown Voltage
    20 Volts
  • Configuration
    Single
  • Module
    No
  • Package
    Ceramic
  • Package Type
    Ceramic
  • Photodetector Type
    PN
  • Operation Mode
    Photoconductive
  • Wavelength Range
    12 to 18 nm
  • Reverse Bias Voltage
    20 V
  • Reverse Current
    1 µA
  • Reverse Voltage
    0 V
  • RoHs
    Yes
  • Shunt Resistance
    10 MOhms
  • Spectral Band
    Ultraviolet
  • Capacitance
    5 to 20 pF
  • Dark Current
    8 to 25 nA
  • Responsivity/Photosensitivity
    0.08 to 0.1 A/W
  • Note
    Detection Range: 12 nm to 18 nm,

Physical Properties

  • Active Area
    100 mm2

Temperature

  • Operating Temperature
    -10 to 40 Degree C
  • Storage Temperature
    -10 to 40 Degree C

Technical Documents
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