GT40A

Laser by Gigaphoton

Note: Your Quotation Request will be directed to Gigaphoton.

The GT40A from Gigaphoton is a Laser with Wavelength 193 nm, Power 45 W, Pulse Energy 11.25 mj. More details for GT40A can be seen below.

 Product Specifications

    Product Details

    • Part Number :
      GT40A
    • Manufacturer :
      Gigaphoton
    • Description :
      4-kHz ArF Excimer Laser for 65-nm or below Technology Node

    General Parameters

    • Configuration :
      Laser Head with Control Unit (Integrated)
    • Type :
      Laser System
    • Technology :
      Excimer laser
    • Operation Mode :
      Pulsed Laser
    • Wavelength :
      193 nm
    • Tunable :
      No
    • Fiber Coupled :
      No
    • Laser Color :
      Ultraviolet
    • Power :
      45 W
    • Pulse Energy :
      11.25 mj
    • Repetition Rate :
      4,000 Hz
    • Rise/Fall Time :
      11.25
    • Laser Gain Medium :
      Argon fluoride (Arf)
    • Bandwidth :
      0.2 to 0.5 pm
    • Pulse Energy :
      11.25

    Technical Documents