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GT63A

Laser by Gigaphoton
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The GT63A from Gigaphoton is a Laser with Power 60 to 90 W, Wavelength 193 nm, Pulse Energy 10 to 15 mJ, Repetition Rate 6000 Hz. More details for GT63A can be seen below.

Product Specifications

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Product Details

  • Part Number
    GT63A
  • Manufacturer
    Gigaphoton
  • Description
    Next-Generation ArF Excimer Laser, Model GT63A: Designed for Multi-Patterning Immersion Lithography Scanners

General Parameters

  • Configuration
    Laser Head with Control Unit (Integrated)
  • Type
    Laser System
  • Technology
    Excimer laser
  • Operation Mode
    Pulsed Laser
  • Power
    60 to 90 W
  • Wavelength
    193 nm
  • Tunable
    No
  • Fiber Coupled
    No
  • Laser Color
    Ultraviolet
  • Pulse Energy :
    10 to 15 mJ
  • Gain Medium Type
    Gas Laser
  • Laser Cavity Material
    ArF
  • Laser Gain Medium
    Excimer Laser
  • Application Industry
    Automotive / Industrial & Manufacturing
  • Repetition Rate
    6000 Hz
  • Bandwidth
    0.3 pm
  • Pulse Energy
    10 to 15 mJ
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