1. Home
  2. Lasers & LED's
  3. Laser Modules & Systems
  4. Gigaphoton
  5. GT64A

GT64A

Laser by Gigaphoton
Request Quote

Note: Your Quotation Request will be directed to Gigaphoton.

The GT64A from Gigaphoton is a Laser with Wavelength 193 nm, Power 60 to 120 W, Pulse Energy 10 to 20 mJ, Repetition Rate 6000 Hz. More details for GT64A can be seen below.

Product Specifications

View similar products

Product Details

  • Part Number
    GT64A
  • Manufacturer
    Gigaphoton
  • Description
    State of the Art ArF Immersion Excimer Laser Supporting 450mm Wafer Multi-patterning Lithography

General Parameters

  • Type
    Laser System
  • Configuration
    Laser Head with Control Unit (Integrated)
  • Application Industry
    Automotive / Industrial & Manufacturing
  • Operation Mode
    Pulsed Laser
  • Wavelength
    193 nm
  • Bandwidth
    0.25 pm
  • Power
    60 to 120 W
  • Pulse Energy :
    10 to 20 mJ
  • Pulse Energy
    10 to 20 mJ
  • Repetition Rate
    6000 Hz
  • Technology
    Excimer laser
  • Tunable
    No
  • Fiber Coupled
    No
  • Laser Color
    Ultraviolet
  • Gain Medium Type
    Gas Laser
  • Laser Cavity Material
    ArF
  • Laser Gain Medium
    Excimer Laser
Click to view more product details on manufacturer's website
Request a Quote